Materials science of thin films: deposition and structure
Ohring, Milton
Materials science of thin films: deposition and structure - 2nd ed. - Academic Press : San Diego , 2002
xxi, 794 p.
0-12-524975-6
Materials science of thin films: deposition and structure - 2nd ed. - Academic Press : San Diego , 2002
xxi, 794 p.
0-12-524975-6