Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California)

Coburn, J. W., ed.

Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California) - Materials Research Society : Pittsburgh, Pennsylvania , 1986
xvii, 463p.

ISBN: 0-931837-34-0

Acc.No.:
28706

Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California)

APA

Coburn J. W. e., . (1986). Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California). Materials Research Society: Pittsburgh, Pennsylvania.

Chicago

Coburn J W ed, . 1986. Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California). Materials Research Society: Pittsburgh, Pennsylvania.

Harvard

Coburn J. W. e., . (1986). Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California). Materials Research Society: Pittsburgh, Pennsylvania.

MLA

Coburn J W ed, . Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California). Materials Research Society: Pittsburgh, Pennsylvania. 1986.

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