Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications
Schuegraf, Klaus K
Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications - Noyes : Park Ridge , 1988
0-8155-1153-1
Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications - Noyes : Park Ridge , 1988
0-8155-1153-1