TY  - BOOK
AU  - Gallois, Bernard M., ed..
TI  - Chemical vapor deposition of refractory metals and ceramics III: symposium
PY  - 1995///
CY  - Materials Research Society
PB  - Pittsburgh
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=10402
ER  -