TY  - BOOK
AU  - Pierson, Hugh O
TI  - Handbook of chemical vapor deposition: principles, technology and applications
SN  - 0-8155-1432-8
PY  - 1999///
CY  - Noyes Publications
PB  - New York
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11709
ER  -