TY  - BOOK
AU  - Adams,T M
TI  - Introductory MEMS : fabrication and applications
SN  - 978-0-387-09510-3
PY  - 2010///
CY  - Springer
PB  - New York
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11743
ER  -