TY  - BOOK
AU  - Madou, Marc J
TI  - Fundamentals of microfabrication and nanotechnology
SN  - 9781420055115
PY  - 2012///
CY  - CRC Press
PB  - Boca Raton
KW  - Microfabrication
KW  - Nanotechnology
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11901
ER  -