TY  - BOOK
AU  - Milek, John T.
TI  - Silicon nitride for microelectronic applications: Part 2. Applications and devices
SN  - 0-306-67106-9
PY  - 1972///
CY  - IFI/Plenum
PB  - New York
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=5939
ER  -