TY  - BOOK
AU  - Coburn, J. W., ed.
TI  - Plasma processing; proc.(68:April 15-18, 1986: Palo Alto, California)
SN  - 0-931837-34-0
PY  - 1986///
CY  - Materials Research Society
PB  - Pittsburgh, Pennsylvania
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9406
ER  -