TY  - BOOK
AU  - Besmann, Theodore M.,ed.
TI  - Chemical vapor deposition of refractory metals and ceramics:symposium
PY  - 1990///
CY  - Materials Research Society
PB  - Pittsburgh, Pennsylvania
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9817
ER  -