TY  - BOOK
AU  - Lee, Hong H
TI  - Fundamentals of microelectronics processing
SN  - 0-07-037056-7
PY  - 1990///
CY  - McGraw-Hill
PB  - New York
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9903
ER  -