TY  - BOOK
AU  - Schuegraf,  Klaus K
TI  - Handbook of thin-film deposition processes and techniques: principles, methods, equipment and applications
SN  - 0-8155-1153-1
PY  - 1988///
CY  - Noyes
PB  - Park Ridge
UR  - http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9996
ER  -