000 00531nam a2200181Ia 4500
003 CGCRI
005 20140812102858.0
008 140225s2014 xx 000 0 eng d
020 _a0-944904-3- 9
040 _cCGCRI
_bENG
041 _hENG
100 _aK M Nair, et al ed.
245 _aMaterials and processes for microelectronic systems
250 _aFirst Internatio nal Ceramic Science and Technology Congress
260 _aThe American Ceramic Society
_bWesterville, Ohio
_c1990
300 _aviii, 733 p.
942 _cBK
999 _c10529
_d10529
856 _uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=10529
_yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=10529