| 000 | 00450nam a2200169Ia 4500 | ||
|---|---|---|---|
| 003 | CGCRI | ||
| 005 | 20140812102917.0 | ||
| 008 | 140225s2014 xx 000 0 eng d | ||
| 020 | _a978-0-470-0893-4 | ||
| 040 |
_cCGCRI _bENG |
||
| 041 | _hENG | ||
| 100 | _aMack, Chris | ||
| 245 | _aFundamental principles of optical lithogrphy: the science of microfabrication | ||
| 260 |
_aJohn Wiley _bChichester _c2007 |
||
| 300 | _axvii, 515 p. | ||
| 942 | _cBK | ||
| 999 |
_c11530 _d11530 |
||
| 856 |
_uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11530 _yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11530 |
||