000 00481nam a2200181Ia 4500
003 CGCRI
005 20140812102920.0
008 140225s2014 xx f 000 0 eng d
020 _a0-8155-1432-8
040 _cCGCRI
_bENG
041 _hENG
100 _aPierson, Hugh O
245 _aHandbook of chemical vapor deposition: principles, technology and applications
250 _a2nd ed.
260 _aNoyes Publications
_bNew York
_c1999
300 _axxiv, 482p.
942 _cBK
999 _c11709
_d11709
856 _uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11709
_yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11709