000 00473nam a2200169Ia 4500
003 CGCRI
005 20140812102840.0
008 140225s2014 xx 000 0 eng d
020 _a0-931837-34-0
040 _cCGCRI
_bENG
041 _hENG
100 _aCoburn, J. W., ed.
245 _aPlasma processing; proc.(68:April 15-18, 1986: Palo Alto, California)
260 _aMaterials Research Society
_bPittsburgh, Pennsylvania
_c1986
300 _axvii, 463p.
942 _cBK
999 _c9406
_d9406
856 _uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9406
_yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9406