000 | 00473nam a2200169Ia 4500 | ||
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003 | CGCRI | ||
005 | 20140812102840.0 | ||
008 | 140225s2014 xx 000 0 eng d | ||
020 | _a0-931837-34-0 | ||
040 |
_cCGCRI _bENG |
||
041 | _hENG | ||
100 | _aCoburn, J. W., ed. | ||
245 | _aPlasma processing; proc.(68:April 15-18, 1986: Palo Alto, California) | ||
260 |
_aMaterials Research Society _bPittsburgh, Pennsylvania _c1986 |
||
300 | _axvii, 463p. | ||
942 | _cBK | ||
999 |
_c9406 _d9406 |
||
856 |
_uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9406 _yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9406 |