000 00540nam a2200181Ia 4500
003 CGCRI
005 20140812102849.0
008 140225s2014 xx 000 0 eng d
020 _aISBN QR 3-540-
040 _cCGCRI
_bENG
041 _hENG
100 _aC SBoyd, Ian W
245 2 _aA MSLaser processing of thin films and microstructures: oxidation, deposition and etching of insulators
250 _aEdition E
260 _aPubl. L Springer-verlag
_bPubl PlcK Berlin
_c1987
300 _aPages N viii, 320p.
942 _cBK
999 _c9954
_d9954
856 _uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9954
_yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9954