000 00415nam a2200169Ia 4500
003 CGCRI
005 20140812102849.0
008 140225s2014 xx 000 0 eng d
020 _a0-89--6-501-2
040 _cCGCRI
_bENG
041 _hENG
100 _aShenai, Krishna, ed.
245 _aVLSI metallization: physics and technologies
260 _aArtech House
_bBoston
_c1991
300 _ax, 529p.
942 _cBK
999 _c9989
_d9989
856 _uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9989
_yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=9989