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Enabling technology for MEMS and nano devices

by Baltes,H.
Type: materialTypeLabelBookPublisher: Wiley-VC H Germany 2004Description: 427p.ISBN: 3-527-30746-X.Online resources: http://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11562
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62-278:66:62.002.3 ENA (Browse shelf) Available 31223

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