000 00718nam a2200217Ia 4500
003 CGCRI
005 20150818134639.0
008 140225s2014 xx 000 0 eng d
020 _a9781420055115
040 _cCGCRI
_bENG
_aCGCRI
041 _hENG
080 _a66:62.002.3
_bFUN
100 _aMadou, Marc J
_91088
245 _aFundamentals of microfabrication and nanotechnology
_cMarc J Madou
250 _a3rd ed.
260 _aCRC Press
_bBoca Raton
_c2012
300 _av.3.
650 _aMicrofabrication
_aNanotechnology
_91089
856 _uhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11901
_yhttp://14.139.222.13:80/cgi-bin/koha/opac-detail.pl?biblionumber=11901
942 _cBK
_2udc
999 _c11901
_d11901